Modelling of material properties for MEMS structures
نویسندگان
چکیده
The paper presents a combined experimental and theoretical study to determine the actual dynamic Young’s modulus (Edynamic) for the mechanical structure of a silicon microaccelerometer. The resonance (natural) frequencies of the suspension arms of accelerometer were measured using MSA-500 Micro System Analyzer and, then, introduced in analytical expressions in order to find Edynamic. The obtained results were used to validate the model of numerical simulation relative to the measured resonance frequencies of analyzed MEMS accelerometer.
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